Balanceworx, Inc

• Tool is fully dis-assembled down to frame
• Thorough cleaning to remove years of accumulated slurry and stains
• Replace e-chain with Balanceworx design remote pneumatic unit and cascade

• New regulators, transducers, and valves
• Relocates pressure regulators, valves and transducers off spindles to top of tool for easy access
• Cascade design provides for cleaner cable runs and prevent early cable failures
• Dual Channel Proportional Pneumatics Boards
• See our remote cascade and pneumatics for more information

• Rotary unions refurbished
• NSK Spindle Motors refurbished
• NSK Drivers refurbished
• Spindles rebuilt, new bearings
• Headsweep assemblies rebuilt
• Cross removed and re-coated
• New spindle covers
• Cross hub and motor assembly removed and rebuilt
• New wafer slip board & dual detection sensor assemblies
• HCLU full rebuild

• Parts re-coated
• New pedestal shaft, cylinders, jaws, forks
• See our HCLU Refurbishment for more details

• Platen motors refurbished
• New platen gearboxes
• Platens and subplatens re-coated

• ISRM modules are refurbished/replaced for each platen
• New slip rings
• New platen bearings
• Rebuilt pad conditioning base assembly with new coatings for base and optional acrylic top covers

• Refurbished pad conditioning head assembly
• New slurry arms with HPR, drop tubes, HPR collars, and slurry arm bases
• New interplaten clean blocks and shrouds
• All new teflon tubing for all fluid delivery
• All new valving for fluid delivery
• New drain assembly (configured for 1, 3, or 4 drain outlets)
• New slurry delivery module with new flow controllers

• Your choice of McMillan, Malema, SMC – pricing options will vary

• New pad conditioning pneumatic control panel
• All new boards for pneutronics rack
• Wet robot rebuilt with extended leadscrew and bearing captured end, new kevlar track belt

• New z-axis, wrist, and shoulder motors

• New exterior lower panels
• New exterior upper panel
• New middle skins (windows)
• New pad conditioning trays and rails

Additional Options

• Conversions between Titan™ and Profiler™
• Pricing changes based on how tool came prior to refurbishment to desired configuration
• Can accommodate additional customer requests

Input Station

• Remove, dis-assemble and clean module
• Replace seals
• Replace roller shafts
• Replace spacers and bushings
• Replace transport belts
• Replace pulleys

Brush Boxes

• Replace all seals and o-rings
• Replace all bushings
• Replace cracked or broken shaft housings
• Replace all drive & transfer belts
• Inspect and replace or rebuild motors
• Inspect sensors and replace as needed

SRD

• Replace aluminum rollers with plastic
• Re-coat all aluminum
• Replace all bushings
• Replace all cylinders
• Replace all drive & transfer belts
• Inspect and replace or rebuild motors
• Inspect sensors and replace as needed

Electrical Cabinet/General

• McMillan flow meters with upper and lower control limits installed on critical chem and DI lines
• Replace all barb fittings with push-to-connect fittings
• New SSD Hard Drive
• New touch-screen display/user interface

This configuration also comes with the following Standard Mirra™ specifications:

• Tool is fully dis-assembled down to frame
• Thorough cleaning to remove years of accumulated slurry and stains
• Replace e-chain with Balanceworx design remote pneumatic unit and cascade

• New regulators, transducers, and valves
• Relocates pressure regulators, valves and transducers off spindles to top of tool for easy access
• Cascade design provides for cleaner cable runs and prevent early cable failures
• Dual Channel Proportional Pneumatics Boards
• See our remote cascade and pneumatics for more information

• Rotary unions refurbished
• NSK Spindle Motors refurbished
• NSK Drivers refurbished
• Spindles rebuilt, new bearings
• Headsweep assemblies rebuilt
• Cross removed and re-coated
• New spindle covers
• Cross hub and motor assembly removed and rebuilt
• New wafer slip board & dual detection sensor assemblies
• HCLU full rebuild

• Parts re-coated
• New pedestal shaft, cylinders, jaws, forks
• See our HCLU Refurbishment for more details

• Platen motors refurbished
• New platen gearboxes
• Platens and subplatens re-coated

• ISRM modules are refurbished/replaced for each platen
• New slip rings
• New platen bearings

• Rebuilt pad conditioning base assembly with new coatings for base and optional acrylic top covers
• Refurbished pad conditioning head assembly
• New slurry arms with HPR, drop tubes, HPR collars, and slurry arm bases
• New interplaten clean blocks and shrouds
• All new teflon tubing for all fluid delivery
• All new valving for fluid delivery
• New drain assembly (configured for 1, 3, or 4 drain outlets)
• New slurry delivery module with new flow controllers

• Your choice of McMillan, Malema, SMC – pricing options will vary

• New pad conditioning pneumatic control panel
• All new boards for pneutronics rack
• Wet robot rebuilt with extended leadscrew and bearing captured end, new kevlar track belt

• New z-axis, wrist, and shoulder motors

• New exterior lower panels
• New exterior upper panel
• New middle skins (windows)
• New pad conditioning trays and rails

Additional Options

• Conversions between Titan™ and Profiler™
• Pricing changes based on how tool came prior to refurbishment to desired configuration
• Can accommodate additional customer requests

Wafer Input Platform

• Change sensor to through beam as required to avoid wafer sensing issues due to backside coloration

Wafer Input Station

• Change sensor to through beam as required
• Rebuild assembly
• All parts that touch the wafer are chemically cleaned

Meg Tank

• All fluid sensors and valves can be chemically cleaned and replaced as required
• Meg tank chemically cleaned
• Wafer present sensor added as required

Brush Boxes

• All fluid sensors and valves can be chemically cleaned and replaced as required
• Brush box bearings replaced with ceramic hybrid bearings
• Brush boxes chemically cleaned

Output Station

• Sensor changed to through beam as required to avoid wafer coloration issues
• Assembly fully refurbished

Walking Beam

• PEEK arms arms installed
• Wafer clamps replaced with either Teflon or PEEK

This configuration also comes with the following Standard Mirra™ specifications:

• Tool is fully dis-assembled down to frame
• Thorough cleaning to remove years of accumulated slurry and stains
• Replace e-chain with Balanceworx design remote pneumatic unit and cascade

• New regulators, transducers, and valves
• Relocates pressure regulators, valves and transducers off spindles to top of tool for easy access
• Cascade design provides for cleaner cable runs and prevent early cable failures
• Dual Channel Proportional Pneumatics Boards
• See our remote cascade and pneumatics for more information

• Rotary unions refurbished
• NSK Spindle Motors refurbished
• NSK Drivers refurbished
• Spindles rebuilt, new bearings
• Headsweep assemblies rebuilt
• Cross removed and re-coated
• New spindle covers
• Cross hub and motor assembly removed and rebuilt
• New wafer slip board & dual detection sensor assemblies
• HCLU full rebuild

• Parts re-coated
• New pedestal shaft, cylinders, jaws, forks
• See our HCLU Refurbishment for more details

• Platen motors refurbished
• New platen gearboxes
• Platens and subplatens re-coated

• ISRM modules are refurbished/replaced for each platen
• New slip rings
• New platen bearings

• Rebuilt pad conditioning base assembly with new coatings for base and optional acrylic top covers
• Refurbished pad conditioning head assembly
• New slurry arms with HPR, drop tubes, HPR collars, and slurry arm bases
• New interplaten clean blocks and shrouds
• All new teflon tubing for all fluid delivery
• All new valving for fluid delivery
• New drain assembly (configured for 1, 3, or 4 drain outlets)
• New slurry delivery module with new flow controllers

• Your choice of McMillan, Malema, SMC – pricing options will vary

• New pad conditioning pneumatic control panel
• All new boards for pneutronics rack
• Wet robot rebuilt with extended leadscrew and bearing captured end, new kevlar track belt

• New z-axis, wrist, and shoulder motors

• New exterior lower panels
• New exterior upper panel
• New middle skins (windows)
• New pad conditioning trays and rails

Additional Options

• Conversions between Titan™ and Profiler™
• Pricing changes based on how tool came prior to refurbishment to desired configuration
• Can accommodate additional customer requests

Chem Cabinets

• Replace damaged or compromised components
• Flushing function checks

DBC

• Upper brush box rebuild
• Lower brush box rebuild
• Left and right chuck rebuild
• Verify functionality and adjust to standard values

TBC

• TBC spin shaft rebuild
• Chuck open/close adjustments
• TBC brusharm rebuild
• Verify functionality and adjust to standard values

DTC

• DTC spin shaft rebuild
• Chuck open/close adjustments
• Separation plate adjustments
• Verify functionality and adjust to standard values

Loader

• Belt replacement and adjustment
• Verify functionality and adjust to standard values

MT1,2,3

• Vacuum seal replacement
• Transfer arm replacement as required
• Verify functionality and adjust to standard values

This configuration also comes with the following Standard Mirra™ specifications:

• Tool is fully dis-assembled down to frame
• Thorough cleaning to remove years of accumulated slurry and stains
• Replace e-chain with Balanceworx design remote pneumatic unit and cascade

• New regulators, transducers, and valves
• Relocates pressure regulators, valves and transducers off spindles to top of tool for easy access
• Cascade design provides for cleaner cable runs and prevent early cable failures
• Dual Channel Proportional Pneumatics Boards
• See our remote cascade and pneumatics for more information

• Rotary unions refurbished
• NSK Spindle Motors refurbished
• NSK Drivers refurbished
• Spindles rebuilt, new bearings
• Headsweep assemblies rebuilt
• Cross removed and re-coated
• New spindle covers
• Cross hub and motor assembly removed and rebuilt
• New wafer slip board & dual detection sensor assemblies
• HCLU full rebuild

• Parts re-coated
• New pedestal shaft, cylinders, jaws, forks
• See our HCLU Refurbishment for more details

• Platen motors refurbished
• New platen gearboxes
• Platens and subplatens re-coated

• ISRM modules are refurbished/replaced for each platen
• New slip rings
• New platen bearings

• Rebuilt pad conditioning base assembly with new coatings for base and optional acrylic top covers
• Refurbished pad conditioning head assembly
• New slurry arms with HPR, drop tubes, HPR collars, and slurry arm bases
• New interplaten clean blocks and shrouds
• All new teflon tubing for all fluid delivery
• All new valving for fluid delivery
• New drain assembly (configured for 1, 3, or 4 drain outlets)
• New slurry delivery module with new flow controllers

• Your choice of McMillan, Malema, SMC – pricing options will vary

• New pad conditioning pneumatic control panel
• All new boards for pneutronics rack
• Wet robot rebuilt with extended leadscrew and bearing captured end, new kevlar track belt

• New z-axis, wrist, and shoulder motors

• New exterior lower panels
• New exterior upper panel
• New middle skins (windows)
• New pad conditioning trays and rails

Additional Options

• Conversions between Titan™ and Profiler™
• Pricing changes based on how tool came prior to refurbishment to desired configuration
• Can accommodate additional customer requests