Remote Cascade

Balanceworx P/N: BW403WFXX

Description

The Balanceworx remote cascade relocates the polishing head pneumatic controls off the spindle to the top of the tool. This provides for reduced squeeze and abrasion of moving cables that lead to early lifetime failures of e-chain assemblies. It also provides a much cleaner and less cluttered look inside of the tool as well as easier access to the pneumatics without having to open the middle skins. Thermal influence on pressure control from the heat given off by spindle motors is avoided.

Included with this solution are new precision controlled regulators (temperature compensated), Burkert valves and custom feedback transducers as well as hybrid integration boards (can be used for 3-zone or 4-zone heads) for closed loop pneumatic control of each polishing head. Shorter calibration time with one time calibration at install has significant down time savings over conventional OEM setup.

If you are being requested to reduce the variation in your process inputs, our solution has a proven track record to achieve improved stability from process run to process run and within each run.

Specs

  • MINUTES FOR REGULATOR CALIBRATION

    Calibration time comparison between Balanceworx Hybrid Integration Pneumatics Board and O.E.M.

    Balanceworx: 3 minutes x 12 regulators = 36 minutes

    O.E.M: 20 minutes x 12 regulators = 240 minutes (4 hrs.)

    Note: Balanceworx regulators require initial installation 1 time calibration only – O.E.M. requires initial installation and frequent unscheduled calibration.

     

    MEMBRANE PRESSURE: STANDARD DEVIATION

    200mm Oxide Process, before & after conversion

    Membrane Pressure: Standard Deviation

    *Significantly less pressure deviation

    Note: O.E.M. transducers used during data collection

     

    INNERTUBE PRESSURE: STANDARD DEVIATION

    200mm Oxide Process, before & after conversion

    Innertube Pressure: Standard Deviation

    *Significantly less pressure deviation

    Note: O.E.M. transducers used during data collection

     

    RETAINING RING PRESSURE: STANDARD DEVIATION

    200mm Oxide Process, before & after conversion

    Retaining Ring Pressure: Standard Deviation

    *Significantly less pressure deviation

    Note: O.E.M. transducers used during data collection

     

    MEMBRANE PRESSURE: COMPARISON TO SET POINT

    Thermal effect not observed on the Balanceworx components

    Membrane Pressure: Comparison to Set Point

    Note: O.E.M. transducers used during data collection

     

    INNERTUBE PRESSURE: COMPARISON TO SET POINT

    Thermal effect not observed on the Balanceworx components

    Innertube Pressure: Comparison to Set Point

    Note: O.E.M. transducers used during data collection

     

    RETAINING RING PRESSURE: COMPARISON TO SET POINT

    Thermal effect not observed on the Balanceworx components

    Retaining Ring Pressure: Comparison to Set Point

    Note: O.E.M. transducers used during data collection