Tool Refurbishment

We do full-tool refurbishments for the following:

  • Mirra™ Stand-alone
  • Mirra-Trak™
  • Mirra-Mesa™
  • Dessica™
  • Re-build of tool occurs in ISO 6 cleanroom environment
  • Tools are fully assembled and cycle tested by running wafers with DI water prior to shiupment
  • On site start-up support includes calibrations & wafer cycling run
  • 1 year limited warranty

 

  • Standard Mirra™
  • Mirra-Trak™
  • Mirra-Mesa™
  • DNS™
  • Tool is fully dis-assembled down to frame
  • Thorough cleaning to remove years of accumulated slurry and stains
  • Replace e-chain with Balanceworx design remote pneumatic unit and cascade
  • New regulators, transducers, and valves
  • Relocates pressure regulators, valves and transducers off spindles to top of tool for easy access
  • Cascade design provides for cleaner cable runs and prevent early cable failures
  • Dual Channel Proportional Pneumatics Boards
  • See our remote cascade and pneumatics for more information
  • Rotary unions refurbished
  • NSK Spindle Motors refurbished
  • NSK Drivers refurbished
  • Spindles rebuilt, new bearings
  • Headsweep assemblies rebuilt
  • Cross removed and re-coated
  • New spindle covers
  • Cross hub and motor assembly removed and rebuilt
  • New wafer slip board & dual detection sensor assemblies
  • HCLU full rebuild
  • Parts re-coated
  • New pedestal shaft, cylinders, jaws, forks
  • See our HCLU Refurbishment for more details
  • Platen motors refurbished
  • New platen gearboxes
  • Platens and subplatens re-coated
  • ISRM modules are refurbished/replaced for each platen
  • New slip rings
  • New platen bearings
  • Rebuilt pad conditioning base assembly with new coatings for base and optional acrylic top covers
  • Refurbished pad conditioning head assembly
  • New slurry arms with HPR, drop tubes, HPR collars, and slurry arm bases
  • New interplaten clean blocks and shrouds
  • All new teflon tubing for all fluid delivery
  • All new valving for fluid delivery
  • New drain assembly (configured for 1, 3, or 4 drain outlets)
  • New slurry delivery module with new flow controllers
  • Your choice of McMillan, Malema, SMC - pricing options will vary
  • New pad conditioning pneumatic control panel
  • All new boards for pneutronics rack
  • Wet robot rebuilt with extended leadscrew and bearing captured end, new kevlar track belt
  • New z-axis, wrist, and shoulder motors
  • New exterior lower panels
  • New exterior upper panel
  • New middle skins (windows)
  • New pad conditioning trays and rails
  • Additional Options
  • Conversions between Titan™ and Profiler™
  • Pricing changes based on how tool came prior to refurbishment to desired configuration
  • Can accommodate additional customer requests

Input Station

  • Remove, dis-assemble and clean module
  • Replace seals
  • Replace roller shafts
  • Replace spacers and bushings
  • Replace transport belts
  • Replace pulleys

Brush Boxes

  • Replace all seals and o-rings
  • Replace all bushings
  • Replace cracked or broken shaft housings
  • Replace all drive & transfer belts
  • Inspect and replace or rebuild motors
  • Inspect sensors and replace as needed

SRD

  • Replace aluminum rollers with plastic
  • Re-coat all aluminum
  • Replace all bushings
  • Replace all cylinders
  • Replace all drive & transfer belts
  • Inspect and replace or rebuild motors
  • Inspect sensors and replace as needed

Electrical Cabinet/General

  • McMillan flow meters with upper and lower control limits installed on critical chem and DI lines
  • Replace all barb fittings with push-to-connect fittings
  • New SSD Hard Drive
  • New touch-screen display/user interface

This configuration also comes with the following Standard Mirra™ specifications:

  • Tool is fully dis-assembled down to frame
  • Thorough cleaning to remove years of accumulated slurry and stains
  • Replace e-chain with Balanceworx design remote pneumatic unit and cascade
  • New regulators, transducers, and valves
  • Relocates pressure regulators, valves and transducers off spindles to top of tool for easy access
  • Cascade design provides for cleaner cable runs and prevent early cable failures
  • Dual Channel Proportional Pneumatics Boards
  • See our remote cascade and pneumatics for more information
  • Rotary unions refurbished
  • NSK Spindle Motors refurbished
  • NSK Drivers refurbished
  • Spindles rebuilt, new bearings
  • Headsweep assemblies rebuilt
  • Cross removed and re-coated
  • New spindle covers
  • Cross hub and motor assembly removed and rebuilt
  • New wafer slip board & dual detection sensor assemblies
  • HCLU full rebuild
  • Parts re-coated
  • New pedestal shaft, cylinders, jaws, forks
  • See our HCLU Refurbishment for more details
  • Platen motors refurbished
  • New platen gearboxes
  • Platens and subplatens re-coated
  • ISRM modules are refurbished/replaced for each platen
  • New slip rings
  • New platen bearings
  • Rebuilt pad conditioning base assembly with new coatings for base and optional acrylic top covers
  • Refurbished pad conditioning head assembly
  • New slurry arms with HPR, drop tubes, HPR collars, and slurry arm bases
  • New interplaten clean blocks and shrouds
  • All new teflon tubing for all fluid delivery
  • All new valving for fluid delivery
  • New drain assembly (configured for 1, 3, or 4 drain outlets)
  • New slurry delivery module with new flow controllers
  • Your choice of McMillan, Malema, SMC - pricing options will vary
  • New pad conditioning pneumatic control panel
  • All new boards for pneutronics rack
  • Wet robot rebuilt with extended leadscrew and bearing captured end, new kevlar track belt
  • New z-axis, wrist, and shoulder motors
  • New exterior lower panels
  • New exterior upper panel
  • New middle skins (windows)
  • New pad conditioning trays and rails

Additional Options

  • Conversions between Titan™ and Profiler™
  • Pricing changes based on how tool came prior to refurbishment to desired configuration
  • Can accommodate additional customer requests

Wafer Input Platform

  • Change sensor to through beam as required to avoid wafer sensing issues due to backside coloration

Wafer Input Station

  • Change sensor to through beam as required
  • Rebuild assembly
  • All parts that touch the wafer are chemically cleaned

Meg Tank

  • All fluid sensors and valves can be chemically cleaned and replaced as required
  • Meg tank chemically cleaned
  • Wafer present sensor added as required

Brush Boxes

  • All fluid sensors and valves can be chemically cleaned and replaced as required
  • Brush box bearings replaced with ceramic hybrid bearings
  • Brush boxes chemically cleaned

Output Station

  • Sensor changed to through beam as required to avoid wafer coloration issues
  • Assembly fully refurbished

Walking Beam

  • PEEK arms arms installed
  • Wafer clamps replaced with either Teflon or PEEK

This configuration also comes with the following Standard Mirra™ specifications:

  • Tool is fully dis-assembled down to frame
  • Thorough cleaning to remove years of accumulated slurry and stains
  • Replace e-chain with Balanceworx design remote pneumatic unit and cascade
  • New regulators, transducers, and valves
  • Relocates pressure regulators, valves and transducers off spindles to top of tool for easy access
  • Cascade design provides for cleaner cable runs and prevent early cable failures
  • Dual Channel Proportional Pneumatics Boards
  • See our remote cascade and pneumatics for more information
  • Rotary unions refurbished
  • NSK Spindle Motors refurbished
  • NSK Drivers refurbished
  • Spindles rebuilt, new bearings
  • Headsweep assemblies rebuilt
  • Cross removed and re-coated
  • New spindle covers
  • Cross hub and motor assembly removed and rebuilt
  • New wafer slip board & dual detection sensor assemblies
  • HCLU full rebuild
  • Parts re-coated
  • New pedestal shaft, cylinders, jaws, forks
  • See our HCLU Refurbishment for more details
  • Platen motors refurbished
  • New platen gearboxes
  • Platens and subplatens re-coated
  • ISRM modules are refurbished/replaced for each platen
  • New slip rings
  • New platen bearings
  • Rebuilt pad conditioning base assembly with new coatings for base and optional acrylic top covers
  • Refurbished pad conditioning head assembly
  • New slurry arms with HPR, drop tubes, HPR collars, and slurry arm bases
  • New interplaten clean blocks and shrouds
  • All new teflon tubing for all fluid delivery
  • All new valving for fluid delivery
  • New drain assembly (configured for 1, 3, or 4 drain outlets)
  • New slurry delivery module with new flow controllers
  • Your choice of McMillan, Malema, SMC - pricing options will vary
  • New pad conditioning pneumatic control panel
  • All new boards for pneutronics rack
  • Wet robot rebuilt with extended leadscrew and bearing captured end, new kevlar track belt
  • New z-axis, wrist, and shoulder motors
  • New exterior lower panels
  • New exterior upper panel
  • New middle skins (windows)
  • New pad conditioning trays and rails

Additional Options

  • Conversions between Titan™ and Profiler™
  • Pricing changes based on how tool came prior to refurbishment to desired configuration
  • Can accommodate additional customer requests

Chem Cabinets

  • Replace damaged or compromised components
  • Flushing function checks

DBC

  • Upper brush box rebuild
  • Lower brush box rebuild
  • Left and right chuck rebuild
  • Verify functionality and adjust to standard values

TBC

  • TBC spin shaft rebuild
  • Chuck open/close adjustments
  • TBC brusharm rebuild
  • Verify functionality and adjust to standard values

DTC

  • DTC spin shaft rebuild
  • Chuck open/close adjustments
  • Separation plate adjustments
  • Verify functionality and adjust to standard values

Loader

  • Belt replacement and adjustment
  • Verify functionality and adjust to standard values

MT1,2,3

  • Vacuum seal replacement
  • Transfer arm replacement as required
  • Verify functionality and adjust to standard values

This configuration also comes with the following Standard Mirra™ specifications:

  • Tool is fully dis-assembled down to frame
  • Thorough cleaning to remove years of accumulated slurry and stains
  • Replace e-chain with Balanceworx design remote pneumatic unit and cascade
  • New regulators, transducers, and valves
  • Relocates pressure regulators, valves and transducers off spindles to top of tool for easy access
  • Cascade design provides for cleaner cable runs and prevent early cable failures
  • Dual Channel Proportional Pneumatics Boards
  • See our remote cascade and pneumatics for more information
  • Rotary unions refurbished
  • NSK Spindle Motors refurbished
  • NSK Drivers refurbished
  • Spindles rebuilt, new bearings
  • Headsweep assemblies rebuilt
  • Cross removed and re-coated
  • New spindle covers
  • Cross hub and motor assembly removed and rebuilt
  • New wafer slip board & dual detection sensor assemblies
  • HCLU full rebuild
  • Parts re-coated
  • New pedestal shaft, cylinders, jaws, forks
  • See our HCLU Refurbishment for more details
  • Platen motors refurbished
  • New platen gearboxes
  • Platens and subplatens re-coated
  • ISRM modules are refurbished/replaced for each platen
  • New slip rings
  • New platen bearings
  • Rebuilt pad conditioning base assembly with new coatings for base and optional acrylic top covers
  • Refurbished pad conditioning head assembly
  • New slurry arms with HPR, drop tubes, HPR collars, and slurry arm bases
  • New interplaten clean blocks and shrouds
  • All new teflon tubing for all fluid delivery
  • All new valving for fluid delivery
  • New drain assembly (configured for 1, 3, or 4 drain outlets)
  • New slurry delivery module with new flow controllers
  • Your choice of McMillan, Malema, SMC - pricing options will vary
  • New pad conditioning pneumatic control panel
  • All new boards for pneutronics rack
  • Wet robot rebuilt with extended leadscrew and bearing captured end, new kevlar track belt
  • New z-axis, wrist, and shoulder motors
  • New exterior lower panels
  • New exterior upper panel
  • New middle skins (windows)
  • New pad conditioning trays and rails

Additional Options

  • Conversions between Titan™ and Profiler™
  • Pricing changes based on how tool came prior to refurbishment to desired configuration
  • Can accommodate additional customer requests